Control of evaporation property and film structure of Te by alloying

摘要

? 2023 Elsevier B.V.A new evaporation source of Te alloy is prepared with low-vapor pressure element Bi, In and Pd to replace the traditional evaporation source pure Te. The composition and structure of Te alloys are analyzed to study the effect on evaporation rate and film structure. The composition of Bi-Te alloy is Bi2Te3 phase and Te phase. In-Te alloy is composed of In2Te5 phase and Te phase. Te is provided from the Te phase of Bi-Te alloy and In-Te alloy. Pd-Te alloy consists of the PdTe phase and the PdTe2 phase. Te is evaporating from the PdTe2 phase. According to the evaporation results of different Te alloys, the evaporation rate of Te alloy is lower than pure Te and develops with the increasing saturated vapor pressure of alloying element. Te film has a needle-shaped structure. The grain size of Te film has effect on the evaporation rate.