Measurement System for Piezoelectric Resonance Impedance Spectroscopy Under Combined AC and High-Voltage DC Loading

摘要

Piezoelectric resonance impedance spectroscopy is a standardized measurement technique for determining the electromechanical, elastic, and dielectric parameters of piezoceramics. However, commercial measurement setups are designed for small-signal measurements and encounter difficulties when constant driving voltages/currents are required at resonances, higher fields, or combined AC and DC loading. The latter is particularly important to evaluate the DC bias-hardening effect of piezoelectrics. Here, we propose a novel measurement system for piezoelectric resonance impedance spectroscopy under combined AC and high-voltage DC loading that complies with established standards. The system is based on two separate output amplifier stages and includes voltage/current probes, a laser vibrometer, custom protection components, and control software with optimization algorithm. In its current form, the measurement setup allows the application of AC frequencies up to 500 kHz and DC signals up to ±10 kV on samples with impedance between 10?1 and $10^{6} Omega $ . The operation of the proposed setup was benchmarked against commercial impedance analyzers in the small-signal range and reference equivalent circuits. Test measurements under combined AC and DC loading were performed on a soft Pb(Zr,Ti)O3 piezoceramic. The results revealed that a DC bias voltage applied along the polarization direction ferroelectrically hardens the material, while the material softens and eventually depolarizes when the DC bias voltage is applied in the opposite direction. The results confirm the suitability of the designed measurement system and open new exciting possibilities for tuning the piezoelectric properties by DC bias fields.