机译:通过直接光学光刻技术对 2D 范德华材料进行通用图案化
Korea Adv Inst Sci & Technol KAIST, Dept Mat Sci & Engn, Daejeon 34141, South Korea;
Korea Adv Inst Sci & Technol KAIST, Dept Phys & KI Nano Century, Daejeon 34141, South Korea;
Korea Adv Inst Sci & Technol KAIST, Sch Elect Engn, Daejeon 34141, South KoreaKorea Adv Inst Sci & Technol KAIST, Dept Mat Sci & Engn, Daejeon 34141, South Korea|Korea Res Inst Stand & Sci KRISS, Operando Methodol & Measurement Team, Interdisciplinary Mat Measurement Inst, Daejeon 34113, South KoreaKorea Res Inst Stand & Sci KRISS, Operando Methodol & Measurement Team, Interdisciplinary Mat Measurement Inst, Daejeon 34113, South Korea;
multi-scale; optical lithography; patterning; photoresist-free; van der Waals materials;