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机译:一种基于活塞模式的新型耦合压电微机械超声换能器
Institute of Technological Sciences, Wuhan University, Wuhan, China;
Pistons; Bandwidth; Acoustics; Integrated circuit modeling; Resonant frequency; Transducers; Aluminum nitride; Crosstalk effect; high emission performance; piezoelectric micromachined ultrasonic transducers (pMUTs); piston mode; ultrawide frequency bandwidth;