An embodiment of the present disclosure provides a method for operating a charged particle-optical apparatus, the method comprising: scanning, with the charged particle-optical apparatus, a sample comprising a series of locations with a charged particle beam, so as to generate scan data; changing a setting of at least one charged particle-optical parameter of the charged particle-optical apparatus from location to location, wherein the at least one charged panicle-optical parameter affects a charged particle-optical grid distortion of the scan data; and compensating for the charged particle-optical grid distortion, based on the changed setting of the at least one charged particle-optical parameter. An embodiment of the present disclosure provides a charged particle-optical apparatus for scanning a sample comprising a series of locations with a charged particle beam, so as to generate scan data, the charged particle-optical apparatus comprising: a charged particle-optical device configured to direct a charged particle beam onto a series of locations, in turn; a detector configured to detect signal charged panicles emitted from the locations, so as to generate scan data; and a controller configured to: change a selling of at least one charged particle-optical parameter of the charged particle-optical apparatus from location to location, wherein the at least one charged particle-optical parameter affects a charged particle-optical grid distortion of the scan data; and compensate for the charged particle-optical grid distortion, based on the changed setting of the at least one charged particle-optical parameter. An embodiment of the present disclosure provides a non-transitory computer readable medium that stores instructions for a processor of a controller to carry out a method of operating a charged panicle-optical apparatus, the method comprising: scanning, with the charged particle-optical apparatus, a sample comprising a series of dies locations with a charged panicle beam, so as to generate scan data; changing a setting of at least one charged particle-optical parameter of the charged particle-optical apparatus from die location to dielocation, wherein the at least one charged panicle-optical parameter affects a charged particle-optical grid distortion of the scan data; and compensating for the charged panicle-optical grid distortion, based on the changed setting of the at least one charged particle-optical parameter. An embodiment of the present disclosure provides a method for operating a scanning electron microscope, SEM, the method comprising: scanning, with the SHM, a sample comprising a series of dies locations with an electron beam, so as to generate scan data; changing a .selling of at least one electron-optical parameter of (he SEM from die location to dielocation. wherein the at least one electron-optical parameter affects an electron-optical grid distortion of the scan data; and compensating for the electron -optical grid distortion, based on the changed selling of the at least one electron-optical parameter. An embodiment of the present disclosure provides a scanning electron microscope, SEM, for scanning a sample comprising a series of dies locations with an electron beam, so as to generate scan data, the SEM comprising: an electron-optical device configured to direct an electron beam onto a sample comprising a series of dieslocations, in turn; a detector configured to detect signal electrons emitted from the dieslocations, so as to generate scan data; and a controller configured to: change a setting of at least one electron-optical parameter of the SEM from die location to dislocation, wherein the at least one electron-optical parameter affects an electron-optical grid distortion of the scan data; and compensate for the electron-optical grid distortion, based on the changed setting of the at least one electron-optical parameter. An embodiment of the present disclosure provides a non-transitory computer readable
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