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机译:Ion implantation effects on the microstructure, electrical resistivity and thermal conductivity of amorphous CrSi2 thin films
Univ Fed Rio Grande do Sul;
Univ Montpellier;
Univ LyonUniv Gustave Eiffel;
THERMOELECTRIC PROPERTIES; SI; ENHANCEMENT; DEFECTS; SILICON; DAMAGE; CR; IRRADIATION; SILICIDES; TRANSPORT;