Improved Purging Gas Arrangement for a Laser Pumped Plasma Source

摘要

A concept for more controlled purging gas flow is provided, thereby reducing the effects of detrimental influence of such gas on the stability and output of an LPPS. Re-use of heat from an active LPPS advantageously puts no additional energy constraints on the system. Moreover, purging gas may be directed where it is needed. Thus, a more efficient LPPS arrangement is provided.