Heterogeneous integration of functional oxides with ultra-wide bandgap (UWBG) semiconductors is desired for the realization of novel hybrid systems applicable to a wide array of commercial electronics and defense applications. In this work, we demonstrate the growth of crystalline SrTiO3 (STO) thin films on high-electron-mobility transistor (HEMT) heterostructures based on an emergent UWBG semiconductor ScAlN, used as the barrier layer on a GaN channel, and determine the effects of the pre-growth chemical treatments of the ScAlN surface on resultant heterostructure properties. We investigate wet chemical cleans of ScAlN with solvents, piranha solution, UV ozone and hydrofluoric acid, and a sulfuric-phosphoric acid mix prior to STO growth, and show that the commonly used piranha solution degrades the ScAlN surface, thereby reducing the crystal quality of the deposited STO layers and lowering the channel mobility. We determine that among the treatments studied, the solvent and sulfuric-phosphoric acid cleans were the least disruptive to the electrical properties of the GaN channel as evidenced from Hall effect measurements, but the sulfuric-phosphoric acid clean results in best oxide crystallinity, as determined from structural characterizations. We perform transmission electron microscopy imaging on the piranha-treated and sulfuric-phosphoric-treated samples to compare the microstructure and find that while intermixing occurs at the oxide-nitride interfaces for both samples, the interface roughness is lower and the STO grain size is larger in the sample with sulfuric-phosphoric acid treatment. This work demonstrates the first epitaxial growth of STO on an UWBG semiconductor and motivates STO/ScAlN/GaN as material platforms for high-frequency, high-power-density HEMTs.
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