Study on Design Optimization of a Symmetry Two-Axis Tilt Angle Capacitive Sensor

摘要

This paper presents the design, optimization, fabrication and characterization of a symmetrical two-axis tilt angle sensor. The sensor consists of a globe-calotte-shaped excitation electrode and two pairs of sensing electrodes of the same dimensions, positioned symmetrically on a 3D printed hollow sphere. The sphere is filled with oil and air, and then mounted on the surface of a printed circuit board (PCB) for mechanical packaging and measurement. Experimental results show that the sensor can measure the tilt angle in both the x- and y-axes with sensitivity of 124?mV/° and resolution of ±0.15° in the range from ?35° to 35°. The characteristics of the sensor on the x- and y-axes are similar. The proposed sensor can be used in several applications.