In ultra-precision equipment, nanoscale rough surface contact widely exists, and the adhesion between interfaces has become a critical component in researching the friction phenomenon. However, adhesion is not considered in traditional friction models. In this study, the adhesion model between fractal contact surfaces is established by proposing the critical truncated area of adhesion, a'_(cut), and a new friction model considering adhesion is established by combining with the traditional model. The present model shows that adhesion increases as the fractal dimension (D) increases or the surface roughness coefficient (G) decreases when contact occurs between nanoscale rough surfaces. The friction coefficient calculated based on the new model is larger than that of the traditional model, especially when G is small. In addition, a static friction force measurement system was built by using the reticle and vacuum chuck in the lithography system. The experimental system measured the maximum static friction between the chuck and the reticle under different normal loads, and the experimental results show that the new model proposed in this paper is more accurate in characterizing the static friction of nanoscale rough surfaces.
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