Investigating the energy spectrum of silicon nanoclusters in a silicon dioxide matrix

摘要

This paper presents the results of an investigation of the energy spectrum of traps that occur in a silicon nanocomposite created using the new “elion” technology—low-temperature laser modification of the surface of a layer of nanoporous silicon in the medium of a strong gaseous oxidant. Combined analysis of the transmission spectra of laser-oxidized nanoporous silicon and the trap-distribution function over the activation energy made it possible to explain the presence of selective absorption in the IR region.