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A lateral-scanning white-light interferometer for topography measurements on rotating objects in process environments

机译:A lateral-scanning white-light interferometer for topography measurements on rotating objects in process environments

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摘要

This paper presents the enhancement of the surface measurement ability of lateral-scanning white-light interferometry (LSWLI) for applications with industrial environments including fast-rotating objects and vibrations. For this purpose, a LSWLI with an integrated laser-speckle-based measurement of the lateral displacement is realised, which enables a vibration compensation and a decoupling of the measurement speed from the surface speed. The approach is validated and characterised in a test setup meeting the measurement conditions of a rotating sheet metal roller during surface reconditioning. The promising results open up the possibility for a high-resolution optical inspection of component topographies close to industrial manufacturing processes.

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