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A review on intense pulsed light process as post-treatment for metal oxide thin films and nanostructures for device application

机译:强脉冲光工艺在金属氧化物薄膜和纳米结构后处理中的应用研究进展

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摘要

The intense pulsed light (IPL) post-treatment process has attracted great attention in the device fabrication due to its versatility and rapidity particularly for solution process functional structures in devices, flexible/printed electronics, and continuous manufacturing process. The metal oxide materials inherently have multi-functionality and have been widely used in form of thin films or nanostructures in device application such as thin film transistors, light emitting diodes, solar cells, supercapacitors, etc. The IPL treatment enhances the physical and/or chemical properties of the functional metal oxide through photothermal effects. However, most metal oxides are transparent to most range of visible light and require more energy for post-treatment. In this review, we have summarized the IPL post-treatment processes for metal oxide thin films and nanostructures in device applications. The sintering and annealing of metal oxides using IPL improved the device performances by employing additional light absorbing layer or back-reflector. The IPL process becomes an innovative versatile post-treatment process in conjunction with multi-functional metal oxides in near-future device applications.
机译:强脉冲光(IPL)后处理工艺因其多功能性和快速性而在器件制造中引起了极大的关注,特别是在器件、柔性/印刷电子和连续制造过程中的解决方案工艺功能结构中。金属氧化物材料本身具有多功能性,在薄膜晶体管、发光二极管、太阳能电池、超级电容器等器件应用中以薄膜或纳米结构的形式被广泛应用。IPL处理通过光热效应增强功能金属氧化物的物理和/或化学性质。然而,大多数金属氧化物对大多数可见光范围都是透明的,并且需要更多的能量进行后处理。本文综述了金属氧化物薄膜和纳米结构在器件应用中的IPL后处理工艺。使用IPL对金属氧化物进行烧结和退火,通过采用额外的光吸收层或背反射器,提高了器件性能。IPL工艺在不久的将来的器械应用中与多功能金属氧化物相结合,成为一种创新的多功能后处理工艺。

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