Multi-Axis Position Measurement Arrangement

摘要

In line with the proposals of this disclosure, a measurement system for a multi-axis interferometric system can be provided, comprising a drive laser and several interferometric targets, each interferometric target configured to receive light from the drive laser at a different instantaneous moment in time compared to all other elements. Each interferometric target may receive light in a consecutive, or in a weighted, order. The drive laser may emit a wavelength in the range 630-635 nm. Accordingly, a multi-axis interferometric arrangement requiring a light signal for measurement in the wavelength range 630-635nm is provided with a single low-power laser, providing a lower cost and lower complexity arrangement than those known in the art.