Reactive thermal evaporated amorphous tin oxide fabricated at room temperature and application in perovskite solar cells

摘要

Abstract Tin oxide (SnOx) as a functional layer, such as electron transport layer (ETL) or buffer layer, is widely used in perovskite solar cells (PSCs). However, SnOx prepared by spin coating is not suitable to be applied to the solar cells with large area or rough substrates. In this paper, SnOx thin films served as the ETL of PSCs were prepared using a simple reactive thermal evaporation (RTE) method, and a convenient ultraviolet ozone treatment (UV‐O3) at room temperature was carried out to replace the common post‐annealing process. The SnOx ETL prepared by RTE is suitable for substrates with arbitrary morphology, and the performance of the PSCs can be improved significantly after the ultraviolet ozone treatment of the SnOx layer. A power conversion efficiency (PCE) up to 20.62 was achieved on the planar PSCs with the RTE SnOx serving as the ETL. Conformal coverage of the RTE SnOx thin film and the perovskite layer on a textured Si surface was achieved, which is helpful for making fully textured monolithic perovskite/silicon tandem solar cells in the future.