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The role of gas analysis in process control for ASUs

机译:The role of gas analysis in process control for ASUs

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摘要

Cryogenic air separation processes are used to divide atmospheric air into three pure gaseous elements - nitrogen (N2), oxygen (O2), and argon (Ar). Further separation can also produce quantities of noble gases such as neon, krypton, and xenon, but the first three elements listed are the products most commonly required by industry, particularly as ultra-high purity (UHP) gases for the semiconductor manufacturing sector.

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