机译:Atomic scale controlled tunnel oxide enabled by a novel industrial tube‐based PEALD technology with demonstrated commercial TOPCon cell efficiencies 24
Nantong University;
Tongwei Solar Co., Ltd.;
Institute of Materials Research and Engineering (IMRE)University of New South WalesShanghai Jiao Tong UniversityRisen Energy Co., Ltd., NingboSoochow UniversityJiangsu Leadmicro Nano Technology Co., Ltd.;
ASC‐TOPCon; PECVD in situ doped Si; silicon oxide; tube‐type PEALD; tunnel oxide;