Materials processing with ultrafast lasers with pulse durations in the range between about 100 fs and 10 ps enable very promising and emerging high-tech applications. Moreover, the average power of such lasers is steadily increasing; multi kilowatt systems have been demonstrated in laboratories and will be ready for the market in the next few years, allowing a significantly increase in productivity. However, the implementation of ultrafast laser processes in applications is very challenging due to fundamental physical limitations. In this paper, the main limitations will be discussed. These include limitations resulting from the physical material properties such as the ablation depth and the optimal fluence, from processing parameters such as air-breakdown and heat accumulation, from the processing system such as thermal focus shift, and from legal regulations due to the potential emission of soft X-rays.
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