机译:用于异构硅光子集成电路的微转印
imec, Heverlee, Belgium;
Photonics Research Group, Department of Information Technology, Ghent University-imec, Ghent, Belgium;
Photonics Research Group, Department of Information Technology, Ghent University-imec, Ghent, Belgium|Brolis Sensor Technology, Ghent, BelgiumPhotonics Research Group, Department of Information Technology, Ghent University-imec, Ghent, Belgium|GlobalFoundries, Dresden, GermanyPhotonics Research Group, Department of Information Technology, Ghent University-imec, Ghent, Belgium|LIGENTEC, EPFL Innovation Park Batiment L, Ecublens, Switzerland;
Silicon; Photonics; Printing; Optical waveguides; Integrated optics; Substrates; III-V semiconductor materials;