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Digital optical measurement system with multielement marks

机译:具有多元素标记的数字光学测量系统

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Subject of study. The possibility of utilizing array elements in angular metrology was investigated. The main focus of the study was to consider two-dimensional multielement marks of various types utilized in a photoelectric auto-collimator with a photodetector array. Aim of study. The study aimed to identify the shape of two-dimensional multielement marks that enable the minimization of errors in determining their centers. Method. The study mainly focused on the results of the development of autocollimators with multielement marks in the form of a circle or set of concentric rings. An algorithm for determining the coordinate of the mark image based on the calculation of the geometric center of the image was proposed and implemented. The algorithm for calculating the coordinate of a mark image involves obtaining the interpolation polynomial for all gradients of the mark edge brightness. Main results. Errors in calculating the coordinate of the mark center based on the geometric center algorithm were obtained via simulations for different diameters of marks, both for the marks in the form of a circle and a set of rings. The optimum sizes of the marks of both configurations were estimated. An autocollimator was calibrated using both types of marks and a rotation table with an angle sensor. Autocollimator calibration using a multiele-ment ring mark and photodetector matrix with a pixel size of 3.45 mu m demonstrated an error in the range of +/- 0.0100 in the measurement range of +/- 60000. Practical significance. Application of the proposed configurations of multiele-ment marks enables a significant reduction in the range of error of photoelectric autocollimators.(c) 2023 Optica Publishing Group
机译:研究主题。研究了在角度计量中使用阵列单元的可能性。该研究的主要重点是考虑在具有光电探测器阵列的光电自动准直器中使用的各种类型的二维多元素标记。研究目的。该研究旨在识别二维多元素标记的形状,从而最大限度地减少确定其中心的误差。方法。该研究主要集中在具有圆形或一组同心环形式的多元素标记的自准直器的开发结果。提出并实现了一种基于图像几何中心计算的标记图像坐标确定算法。用于计算标记图像坐标的算法涉及获取标记边缘亮度的所有梯度的插值多项式。主要结果。通过对不同直径的标记进行模拟,既包括圆形标记,也包括一组环形标记,从而获得了基于几何中心算法计算标记中心坐标的误差。估计了两种配置的标记的最佳尺寸。使用两种类型的标记和带有角度传感器的旋转台校准自准直仪。使用像素尺寸为 3.45 μ m 的多光环标记和光电探测器矩阵进行自准直器校准,结果表明误差在 +/- 0 范围内。0100 在 +/- 60000 的测量范围内。现实意义。应用所提出的多电标记配置可以显著减小光电自准直器的误差范围。(c) 2023 Optica 出版集团

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