机译:沉积在硅晶圆上的无铅介电薄膜具有巨大的储能密度,具有人工死层
College of Material Science and Engineering,Sichuan University,Chengdu,610064,China;
Center on Nanoenergy Research,Guangxi Key Laboratory of Processing for Non-ferrous Metal and Featured Materials Guangxi Key Laboratory for Relativity Astrophysics,School of Physical Science & Technology,Guangxi University,Nanning,530004,China;
School of Materials Science and Engineering,South China University of Technology,GuangZhou,510640,ChinaBCMaterials,Basque Centre for Materials,Applications and Nanostructures,UPV/EHU Science Park,48940,Leioa,SpainSchool of Materials Science and Engineering,Georgia Institute of Technology,Atlanta,GA,30332-0245,USA;
Artificial dead-layer implantation; Lead-free; Relaxor ferroelectric thin films; Electric breakdown strength; Energy storage;