Precision gas delivery is at the core of semiconductor manufacturing. Many different gases - corrosives, reactives and inerts - in varying flow rates are delivered to process chambers to produce critical features on silicon wafers that are used in manufacturing logic and memory chips. These gases, collectively called electronic specialty gases (ESG), also find applications in the manufacture of solar cells and flat panels including liquid crystal displays (LCDs) and light emitting diodes (LEDs). There is not only a need to deliver these gases in precise quantities and with excellent repeatability but also with stringent purity levels.
展开▼
