Dimensional optimization and modelling of a novel double-ended-tuning-fork micro-resonator for high frequency applications

摘要

Micro-resonators are used intensively in various sensors and actuators. An important consideration for resonator-based structures is to have a great level of balance and stability in the vibrational mode opted for resonator operation. In this paper, the object of study is a double-ended-tuning-fork (DETF) resonator which has the inherent advantages of high sensitivity and improved performance. A systematized evaluation of resonator performance is done through a simulative approach for the basic shapes of DETF resonators found in the literature. The boundary organization and geometric framework of the DETF resonator are extensively examined. Resonator modelling is done using the finite element model tool COMSOL and a novel design of the DETF resonator is presented. The focal point of this study is designing a flexural resonator structure suitable in high frequency design requirements along with improved stress considerations for the resonator design. This study demonstrates the outcomes of simulations like impact on stress at the fixed ends, impact on the anti-symmetric mode of operation like its position, frequency, and modal interference. Lastly, certain simplified design rules for novel micro-DETF resonator designing are also presented.