机译:Improvement of Adhesion Strength of Fluoropolymer Thin Films by Vapor Deposition Polymerization
The authors are with the Department of Organic and Polymer Materials Chemistry, Tokyo University of Agriculture and Technology, Koganei-shi, 184-8588 Japan,The author is also with the Micro Engineering Inc., Tokyo,103-0015 Japan;
The authors are with the Department of Organic and Polymer Materials Chemistry, Tokyo University of Agriculture and Technology, Koganei-shi, 184-8588 Japan;
fluoropolymer; ion-assisted deposition; deposition polymerization; adhesion strength; antireflection;