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机译:纳米光刻光学系统的发展前景
OAO SA Zverev Krasnogorsk Factory, Krasnogorsk, Moscow Oblast, Russia.;
NPK SI Vavilov State Opt Inst, St Petersburg, Russia.;
SI Vavilov State Opt Inst All Russia Sci Ctr, Sci Res & Technol Inst Opt Mat Sci, St Petersburg, Russia.Russian Acad Sci, AF Ioffe Physicotech Inst, St Petersburg, Russia.;
DESIGN; LASER; optical systems;