Using a circular-scanning method to form and monitor the topology of high-precision photomasks for integrated sensors of optical quantities

摘要

This paper analyzes the results of forming and monitoring the topology of photomasks for integrated pressure and turning-angle sensors obtained by means of processing and measurement equipment that operates in polar and Cartesian coordinate systems. It is shown that it is advisable to employ equipment that uses a circular-scanning method to enhance the accuracy with which the given items are fabricated and monitored. (C) 2017 Optical Society of America.