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首页> 外文期刊>Journal of optical technology >Fabrication of transparent conductive aluminum zinc oxide nanostructured thin film on polycarbonate substrate for heat mirror applications
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Fabrication of transparent conductive aluminum zinc oxide nanostructured thin film on polycarbonate substrate for heat mirror applications

机译:在聚碳酸酯基板上制备用于热镜应用的透明导电氧化铝锌纳米结构薄膜

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In this work an aluminum zinc oxide nanostructure thin film was deposited on polycarbonate polymer substrates using a magnetron sputtering technique. X-ray diffraction, field emission scanning electron microscopy and X-ray photoelectron spectroscopy methods were used to investigate the structure, morphology and surface composition of the thin film. The transmittance and reflectance of the aluminum zinc oxide thin film was investigated by a UV-VIS-NIR spectrophotometer. The sheet resistance of the aluminum zinc oxide thin film was measured by the four point probe method. The average reflectance in the near infrared region and the sheet resistance of the aluminum zinc oxide thin film were 30 and 105 Omega/sq, which encourages the heat mirror of the aluminum zinc oxide thin film. (C) 2015 Optical Society of America.
机译:在这项工作中,使用磁控溅射技术在聚碳酸酯聚合物基板上沉积了铝锌纳米结构薄膜。采用X射线衍射、场发射扫描电子显微镜和X射线光电子能谱等方法对薄膜的结构、形貌和表面组成进行了研究。采用紫外-可见-近红外分光光度计研究了氧化铝锌薄膜的透射率和反射率。采用四点探针法测量了氧化铝锌薄膜的薄层电阻。氧化铝锌薄膜在近红外区的平均反射率和薄层电阻分别为30%和105 Ω/sq,这促进了氧化铝锌薄膜的热镜。(C) 2015 年美国光学学会。

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