The crystal structure and optical properties of Pd thin films (thickness 10-130 nm) obtained by thermal deposition in vacuum are studied. It is shown that the Pd films are polycrystalline and the average size of crystallites depends on the film thickness. The transparency of films at a wavelength of 0.95 mu m is studied in air and hydrogen (100) atmospheres. It is experimentally found that the optical transparency of Pd films with thicknesses in the range of 10-45 nm obeys the Bouguer law in both air and hydrogen atmospheres. The thickness range of Pd films suitable for practical application in hydrogen sensors is determined experimentally.
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