Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas

摘要

For unmagnetized low temperature Ar plasmas with plasma density ranging from 3 x 10(8) to 10(10) cm(-3) and an electron temperature of similar to 1 eV, the expansion of the ion collecting area of a double-sided planar Langmuir probe with respect to probe bias is experimentally investigated, through a systematic scan of plasma parameters. In accordance with many existing numerical studies, the ion collecting area is found to follow a power law for a sufficiently negative probe bias. Within our experimental conditions, the power law coefficient and exponent have been parameterized as a function of the normalized probe radius and compared with numerical results where qualitatively comparable features are identified. However, numerical results underestimate the power law coefficient while the exponent is overestimated. Our experimental measurements also confirm that ion-neutral collisions play a role in determining the expanded ion collecting area, thus changing values of the power law coefficient and exponent. This work suggests that a power law fit to the ion collecting area must be performed solely based on experimentally obtained data rather than using empirical formulae from simulation results since material and cleanness of the probe, type of working gas, and neutral pressure may also affect the expansion of the ion collecting area, factors which are difficult to model in a numerical simulation. A proper scheme of analyzing an I-V characteristic of a Langmuir probe based on a power law fit is also presented.