机译:Synthesis and tribological behavior of silicon oxycarbonitride thin films derived from poly(urea)methyl vinyl silazane
Univ Colorado;
Sandia Natl Labs;
PULSED-LASER ABLATION; C-N; MECHANICAL-PROPERTIES; CERAMIC COATINGS; SICN COATINGS; DEPOSITION; CARBONITRIDE; RESISTANT; PRESSURE; NITRIDE;