Increasing the accuracy with which the optical transfer function is calculated for an arbitrary wave aberration

摘要

A method has been developed for calculating the values of the optical transfer function (OTF) for central screening of the pupil and an arbitrary wave aberration in the form of a polynomial. The proposed method is a generalization of the trapezoid method for computing one-dimensional integrals to the two-dimensional case of the calculation of the OTF integral. The main interest is in the effective minimization of boundary errors. Examples are given of computations of the OTF with an error no greater than 0.001 for aberrations of the type of astigmatism and third-order spherical aberration.