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Laser induced metastable phases in microcrystalline silicon

机译:微晶硅中的激光诱导亚稳相

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摘要

It has been found using Raman spectroscopy that metastable Si phases reversibly appear in silicon microparticles (mu-Si) due to local heating on increasing the power of a He-Ne excitation laser from 0.03 to 3 mW. Prolonged annealing of these phases by laser radiation makes it possible to estimate that local heating occurs to a temperature of similar to 250 degrees C rather than 1000 degrees C as it was believed previously.
机译:使用拉曼光谱发现,由于局部加热,将 He-Ne 激发激光器的功率从 0.03 mW 增加到 3 mW,亚稳态 Si 相可逆地出现在硅微粒 (mu-Si) 中。通过激光辐射对这些相进行长时间退火,可以估计局部加热的温度类似于 250 摄氏度,而不是以前认为的 1000 摄氏度。

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