Nonlinear Vibration Control for Nanobeam with Time Delay by Field Effect Transistor Sensing

摘要

A vibration control signal sensing method is proposed utilizing the grid electrode displacement sensitive effect of field-effect transistors. The signal sensing method is applied to nonlinear resonance delay control of a nanobeam that is used as the core component of nano-microdevices. The nonlinear vibration dynamical model of the nanobeam based on the field-effect tube sensing is established and the differential equation of motion with time delay control is presented. The amplitude frequency response equation and phase frequency response equation of the nanobeam are obtained by analyzing the first-order approximate solution of the primary and superharmonic vibration of the nonlinear equation with multi-scale method. The vibration feedback gain and time delay can affect the vibration amplitude and nonlinear behavior of the nanobeam. The nonlinear vibration of the nanobeam can be adjusted and effectively controlled by selecting appropriate feedback gains and time delays.