This paper, which is being published in two parts, provides a summary and analysis of the various effects that occur in ellipsometry and reflection spectroscopy studies of wedge-shaped thin films. In the first part of the paper, we calculate various optical characteristics of wedge-shaped films on substrates: the reflection coefficients and the spatial distribution of the light intensity entering a null-ellipsometer detector. We discuss whether existing theoretical approaches can be used in the study of wedge-shaped films and examine specific issues that arise when using null ellipsometry to determine the ellipsometric parameters (psi and Delta) of such films. Part II of this paper will describe the results obtained through an experimental study of wedge-shaped films. (C) 2017 Optical Society of America.
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