机译:A THEORY FOR THE FORMATION OF TETRAHEDRAL AMORPHOUS CARBON INCLUDING DEPOSITION RATE EFFECTS
UNIV SYDNEY SCH PHYS SYDNEY NSW 2006 AUSTRALIA;
Amorphous carbon; Deposition process; Diamond; Ion-assisted deposition; Diamond-like carbon; Compressive-stress; Subplantation model; Film growth; Thin-films; Energy; Microstructure; Bombardment;