Automatic shaping process for producing optical elements

摘要

This article presents the work carried out at the Scientific Research Institute for Comprehensive Testing of Optoelectronic Devices and Systems to create a process for automatically shaping precision optical surfaces, including equipment for grinding and polishing optical surfaces, methods of interference monitoring, and software and techniques for using a compact tool. The results of processing the surface of a laser mirror with asphericity 400 mu m are presented. (C) 2009 Optical Society of America.