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Arrays of InP-based Avalanche Photodiodes for Photon Counting

机译:用于光子计数的基于 InP 的雪崩光电二极管阵列

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摘要

Arrays of InP-based avalanche photodiodes (APDs) with InGaAsP absorber regions have been fabricated and characterized in the Geiger mode for photon-counting applications. Measurements of APDs with InGaAsP absorbers optimized for 1.06 $mu$m wavelength show dark count rates (DCRs) $#x226A;20$ kHz for room-temperature operation with photon detection efficiency (PDE) up to 50 and a reset or dead time of 1$;mu$s. APDs with InGaAs absorbers optimized for 1.55 $mu$m wavelength and 240 K temperature have DCRs #x226A;20 kHz, PDE up to 45, and a reset time of $sim$ 6 $mu$s. Arrays for both wavelengths have been fabricated and packaged with GaP microlenses (of 100 and 50 $mu$m pitch) and CMOS readout integrated circuits (ROICs). Comparisons are made between ROICs that operate in the framed-readout mode as well as those that operate in continuous-readout mode.
机译:已经制备了具有InGaAsP吸收体区域的基于InP的雪崩光电二极管(APD)阵列,并在盖革模式下进行了表征,用于光子计数应用。使用针对 1.06 $mu$m 波长优化的 InGaAsP 吸收体对 APD 的测量显示,室温操作的暗计数率 (DCR) 为 $≪20$ kHz,光子检测效率 (PDE) 高达 50%,复位或死区时间为 1$;带有针对 1.55 $mu$m 波长和 240 K 温度优化的 InGaAs 吸收体的 APD 具有 DCR ≪20 kHz,偏微分方程高达 45%,复位时间为 $sim 6 $mu$s。两种波长的阵列均采用GaP微透镜(100和50 $mu$m间距)和CMOS读出集成电路(ROIC)制造和封装。比较了在成帧读出模式下工作的ROIC和在连续读出模式下工作的ROIC。

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