Consideration of high-speed moving system for large-sized quartz crystal blanks

摘要

For the mass production of the crystal resonators currently explosively used in the mobile communications field or the optical fiber communications field, and the improvement in production efficiency, it is in the tendency that crystal blank size also becomes large, like a semiconductor wafer. High-speed movement of the large-sized quartz crystal blanks need to be safely carried out in manufacturing process. As this solution, crystal blanks are contained to a capsule, and when this capsule passes through the inside of the orbit of the special twist structure which various processing parts attach, the method of carrying out high-speed processing of the crystal blanks in a capsule is studied. This high-speed move processing system is applicable to the orientation measurement process by the X-ray goniometer of the crystal blank after cutting, the visual inspection process after Lapping & Polishing or the defective inspection process after patterning. From an economical field, it describes that management loss on line is dependent on the resolution ability of CCD image sensors.