Compact Multifunctional Mass Flow Meters/Controllers for Gases

摘要

Bronkhorst's new FLEXI-FLOW combines the advantages of a unique through-chip-sensor with proven by-pass technology.The compact thermal mass flow meters and controllers are 35% smaller than traditional instruments,the smallest on the market for flow ranges up to 20 In/min.Due to the new sensor technique,the instruments feature very stable flow control,but also very fast control,with settling times smaller than 150 ms.FLEXI-FLOW instruments have integrated temperature and pressure sensors and an on-board gas database for highest accuracy,even at varying process conditions.With this new technology,the instruments are adaptable to many applications through their wide dynamic flow ranges(up to 1:1000).The temperature and pressure signals may provide the user with information about the actual process conditions.So in fact,FLEXI-FLOW is more than just a flow meter or controller;it's a multi-parameter measurement/control device.