Fabrication of pseudo-spin-valve giant magnetoresistance arrays for nanomagnet logic by liftoff and the snow-jet process

摘要

In Nanomagnet Logic, an electronic read-out device converts magnetization to electronic signals. A giant magnetoresistance (GMR) stack, with simple deposition procedures, is a good candidate for this purpose. In this paper, the authors propose a way to pattern GMR films with the help of a CO_2 snow-jet to simplify device fabrication procedures. A scanning electron microscope and a vibrating sample magnetometer were used to characterize the devices and verify the feasibility of the fabrication method. Results have shown that the CO_2 snow-jet process can remove sidewalls of nanopillars that are formed after lift-off of sputtered films, and the nanopillars are uniform in shape and size. This method presents a new way to fabricate electronic readout devices for Nanomagnet Logic circuits.