A Novel Laser Range Finder Calibration Method Applied to Improve Accuracy of Roll-to-Roll Measurement Motion Stage

摘要

When the Roll-to-Roll (R2R) process technology is promoted, it also enhances the demand for film detection and accuracy of measurement system. The 2D image detection and 3D contour measurement are required in the R2R process. The 2D image detection system is to find the position of film defects, and then use the 3D contour measurement system is to measure the size of film defects. However, the 2D image detection system and 3D contour measurement system needs to be mapped based on the same coordinate system to accurately locate the defect location. The system architecture of the motion stage determines the quality level of positioning accuracy, and the accuracy of the motion reference. Therefore the calibration accuracy of the motion reference will be the key to improve the overall accuracy of the positioning system accuracy. This research will look for the motion axis accuracy calibration method. The laser range finder made by Hewlett Packard, the structural member and the mirror group, are basic tools for calibration of accuracy of motion reference. From the parallelism between the interference optical axis and the motion axis we define a set of adjustment methods. This calibration method takes into consideration of the effect of temperature and humidity of the air medium on the laser light. Finally, we calculate a set of compensation table for the motion axis that can enhance the R2R position accuracy.