A tunable submicro-optofluidic polymer filter based on guided-mode resonance

摘要

Optical filters with reconfigurable spectral properties are highly desirable in a wide range of applications. We propose and experimentally demonstrate a tunable submicro-optofluidic polymer guided-mode resonance (PGMR) filter. The device is composed of a periodic grating sandwiched between a high index waveguide layer and a low index capping layer, which integrates submicrofluidic channel arrays and a PGMR filter elegantly. A finite difference time domain (FDTD) method is employed to understand the spectral properties and determine appropriate device parameters. We fabricated the polymer guided-mode resonance filter with a method combining two-beam interference lithography, floating nanofilm transfer and thermal bonding techniques. Experimental results show that our tunable submicro-optofluidic PGMR filters can provide a broad spectral tuning range (13.181 nm), a narrow bandwidth (85%) in the visible region. Such submicro-optofluidic PGMR filters are highly compatible with existing nano/microfluidic technologies and would be valuable for the integrated flexible optical system.