Plasmonic color filter based on a hetero-metal-insulator-metal grating

摘要

Plasmonic color filters are expected to be candidates for application to complementary metal-oxide- semiconductor (CMOS) image sensor arrays with reduced pixel size, owing to the subwavelength mode volume of plasmons. Designs of metallic gratings based on the guided-mode resonance effect suffer from the sideband transmission issue due to high-order diffraction. Here, we propose a plasmonic color filter structure based on a hetero-metal-insulator-metal grating. The guided mode, in resonance with the second-order diffraction, is highly attenuated by the forbidden band, such that the sideband transmission can be suppressed. As calculated by using the transfer matrix method and the finite-difference time-domain method, the AlZnO-Ag waveguide-based structure presents a color filter characteristic with the peak transmittance greater than 70% and the peak wave-length tunable in the visible light band. It may find application in displays, image sensors, and biomedical imaging technologies. (C) 2020 Optical Society of America