Fabrication and characterization of deformed microdisk cavities in silicon dioxide with high Q-factor

摘要

We demonstrate the excitation and characterization of whispering gallery modes in a deformed optical microcavity. To fabricate deformed microdisk microresonators we established a fabrication process relying on dry plasma etching tools for many degrees of freedom and a shape-accurate morphology. This approach allowed us to fabricate resonators of different sizes with a controlled sidewall angle and underetching in large quantities with reproducible properties such as a surface roughness R-Q <= 2 nm. The excitation and characterization of these modes were achieved by using a state-of-the-art tapered fiber coupling setup with a narrow linewidth tunable laser source. The conducted measurements in shortegg resonators showed at least two modes within a spectral range of about 237 pm. The highest Q-factors measured were in the range of 10(5). Wave optical eigenmode and frequency domain simulations were conducted that could partially reproduce the observed behavior and therefore allowus to compare the experimental results. (C) 2020 Optical Society of America