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Parallel phase shifting radial shear interferometry with complex fringes and unknown phase shift

机译:平行相移径向剪切干涉测量与复杂的条纹和未知相移

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We present an interferometric method to analyze transparent samples using complex fringes generated by a parallel phase shifting radial shear interferometer using two coupled interferometers. Parallel interferograms are generated using two interferometers: the first one generates the polarized base pattern, and the second system is used to generate parallel interferograms allowing the adjustment of the x - y positions of the parallel interferograms. To obtain the optical phase map, parallel phase shift is generated by collocating polarizing filters at the output of the system; the polarizers are placed at arbitrary angles since they do not require adjustment because of the phase-recovery algorithm. The optical phase was processed using a two-step algorithm based on a modified Gram-Schmidt orthogonalization method. Such an algorithm has the advantage of not being iterative and is robust to amplitude modulation. The proposed method reduces the number of captures needed in phase-shifting interferometry. We applied the developed system to examine static and dynamics phase objects. (C) 2020 Optical Society of America
机译:我们介绍了一种干涉测量方法,用于使用由两个耦合的干涉仪产生的平行相移径向剪切干涉仪产生的复杂条纹来分析透明样品。使用两个干涉仪生成并行干涉图:第一个产生偏振基本图案,第二系统用于产生并行干扰图,允许调整并联干扰图的X-Y位置的调整。为了获得光学相位映射,通过在系统的输出端构建偏振滤光器来产生平行相移;偏振器以任意角度放置,因为由于相位恢复算法,它们不需要调整。使用基于改进的Gram-Schmidt正交化方法的两步算法处理光学相位。这种算法的优点是不迭代并且具有稳健的幅度调制。所提出的方法减少了相移干涉测量中所需的捕获次数。我们应用了开发系统来检查静态和动态相位对象。 (c)2020美国光学学会

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    《Applied optics》 |2020年第7期|共7页
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