Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition

摘要

Rotational spatial plasma-enhanced atomic layer deposition has been used to deposit thin films on half-sphere lenses. Non-uniformity of less than +/- 1% is demonstrated for Nb2O5 deposited at 1.4 angstrom/s and for SiO2 deposited at 6 angstrom/s. (C) 2019 Optical Society of America