Thermal drift compensation of a magnetostrictive torque sensor constructed from an Ni-Fe sputtered film and a Ti-alloy or a SUS304 stainless-steel shaft

摘要

The sputtering technique was used to prepare Ni-Fe magnetostrictive films on Ti-alloy or SUS304 stainless-steelshafts for construction of torque sensors. The factors affectingthe thermal drift of the toque sensors are studied as functions ofthe composition and the thickness of the Ni-Fe films, the thermalexpansion coefficients of the Ni-Fe films and the shaft materials,and the thermal expansion coefficient of the pick-up copper coils.The optimal value of the thickness for the determined patternwidth for each composition of the Ni-Fe films was found toresult in minimum thermal drift of the torque sensor.