Surfaces of martensite 12Cr-2Mo-Mn steel andtitanium alloy VT-18U were irradiated with 40 keV N+ ions andnitrogen plasma flow. It was shown that preliminary 30 keVN2+ ion implantation and subsequent plasma treatment increaseof nitrogen penetration in the materials more then an order ofmagnitude compared to theoretical ion range, the microhardnessbeing increased in 3 and 1.8 times for steel and titanium alloycorrespondingly. A X-ray amorphous layer near the steel surfaceis formed as a result of implantation-plasma treatment. Intitanium alloy δ-phase of TiN was observed. Deep penetrationof nitrogen atoms is explained by their repulsive interaction,which results to appearance of the force acting on the atoms anddirected toward the deep in. This interaction is effective at high(>1 at.%) concentration of implanted atoms.
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