Development of new metal seals - metal seals with low compression force

摘要

In recent years, the use of industrial equipment in severe conditions are growing. The seals applied in such conditions must endure high and very low temperatures, various lands of fluid and gases. In addition, in the semiconductor industry, seals using elastomer or plastic materials cannot endure out gas and gas penetration. Therefore, elastomer or plastic seals are being replaced with metal seals represented by metal-O-rings. However, it is difficult for engineers to apply metal-O-rings to various equipments, because of their larger compression force, smaller spring back and their tend to damage the flange surface. Therefore, metal seals are used only in limited situations. We have developed three lands of new metal seals. These seals are improved to overcome the weak points ofmetal-O-rings. (1) "SUNLIMES I" … Larger spring back, lower compression force, easy to handle than metal-O-rings. (2) "SUNLIMES II" … Lowest compression force, high performance for sealing capability without surface treatment (plating and coating), suit to the center-ring application of vacuum seal. (3) "SUNLIMES III" … Lower compression force than metal-O-rings, suit to small size seals as semiconductor specification "SEMI 2787.1".