Safety system for gas supplies and exhausts gas treatment at IC production

摘要

In semiconductor industry, there is tendency torequire various kind of special material gas, because of theincreasing requirement of multilevel interconnection for highintegration level device. These material gases have variousproperties such as combustible, toxic or corrosive. In ICequipment, these material gases are received many kind ofplasma reaction. So, the exhaust gas from the equipmentcontains many complicated gases. Consequently, it is necessaryto pay attention about the raw material gas characteristic and thereaction in the IC equipment.